Productions

Parameter

Unit

Value

Diameter

mm 

(inch)

76.2 (3)

100.0 (4)

Polytype

–

4Н

Orientation

degree

4° toward  <11-20>

± 0.5°

Conductivity

–

n-type

Dopant

–

nitrogen

Edge exclusion:

76.2 mm (3 inch)

100.0 mm (4 inch)

mm

2

3

Usable area

%

not less than 92

Epi layer target thickness
(Si-face)

µm

0.2 – 50

Epi layer thickness uniformity 

%

±2

Epi layer net doping

cm^-3

9×10¹⁴ – 1×10¹⁹

Epi layer net doping uniformity
(Si-face)

%

±10

Net doping maximum deviation
(Si-face)

%

±20

Epi  defects density 

сm^-2

not more than 0.5

Micropipe density

cm^-2

0 – 1